A New Multi-Dimensional Depletion Concept of Homogenization Field Devices

A new homogenization field device with multi-dimensional depletion (M-HOF) is proposed and experimentally demonstrated in this letter. Periodic elliptical trenches, connected in pairs, are formed in the drift region to replace the conventional discrete circular trenches and introduce the multi-dimensional depletion effect. As a result, the optimized doping concentration of the M-HOF device is increased and the current path is widened by the elliptical trenches, leading to a significant reduction in the specific on-resistance ${R}_{\text {on},{sp}}$ . It has been demonstrated experimentally that the M-HOF device achieved a ${R}_{\text {on},{sp}}$ of only 15.5 $\text{m}\Omega \cdot $ cm2 at a breakdown voltage ${V}_{\text {B}}$ of 436 V, realizing a 21% reduction compared to that of the complementary HOF device under the similar ${V}_{\text {B}}$ .