压力传感器
材料科学
光学
薄膜
测距
光电子学
计算机科学
声学
纳米技术
物理
工程类
机械工程
电信
作者
Haoyang Wang,Wenqing Wang,Jae Joon Kim,Chunya Wang,Yan Wang,Binghao Wang,Sung-Hoon Lee,Tomoyuki Yokota,Takao Someya
出处
期刊:Science Advances
[American Association for the Advancement of Science (AAAS)]
日期:2023-09-08
卷期号:9 (36)
被引量:2
标识
DOI:10.1126/sciadv.adi2445
摘要
Multipoint 3-axis tactile pressure sensing by a high-resolution and sensitive optical system provides rich information on surface pressure distribution and plays an important role in a variety of human interaction-related and robotics applications. However, the optical system usually has a bulky profile, which brings difficulties to sensor mounting and system integration. Here, we show a construction of thin-film and flexible multipoint 3-axis pressure sensor by optical methods. The sensor can detect the distribution of 3-axis pressure on an area of 3 centimeter by 4 centimeter, with a high-accuracy normal and tangential pressure sensing up to 360 and 100 kilopascal, respectively. A porous rubber is used as a 3-axis pressure-sensitive optical modulator to omit the thick and rigid focusing system without sacrificing the sensitivity. In addition, by integrating thin and flexible backlight and imager, the sensor has a total thickness of 1.5 milimeter, making it function properly even when bent to a radius of 18 milimeter.
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