An adaptive grid approach for the simulation of electromigration induced void migration
作者
H. Ceric,S. Selberherr
标识
DOI:10.1109/sispad.2002.1034566
摘要
For tracking electromigration induced evolution of voids a diffuse interface model is applied. We assume an interconnect as two-dimensional electrically conducting via which contains initially a circular void. The diffuse interface governing equation was solved applying a finite element scheme with a robust local grid adaptation algorithm. Simulations were carried out for voids exposed to high current.