The siloxane in biogas is a matter making a problem in the gas engine generator by forming scales and reducing the durability of the generator. Generally, the siloxane concentration of landfill biogas is higher than that from livestock manure, food wastes and sewage sludge. But co-digester in `A` city had high siloxane concentraion, it needed to operate additional siloxane removal processing facilities. The siloxane concentration of co-digester biogas of livestock manure, Food waste and sewage sludge about Hexamethyldisiloxane(L2), Octamethyltrisiloxane(L3), Decamethyltetrasiloxane(L4), Hexamethylcyclotrisiloxane (D3), Octamethylcyclotetrasiloxane(D4) and Decamethylcyclopentasiloxane(D5) was 23.1~62.6 totally. The L2 (16.2~40.7 ppb) and D4 (5.2~20.4 ppb) was occupied by a large amount. L3, L4 and D3 was not detected and there was 1.5~1.9 ppb trace D5. Carbon and silica gel was used to remove siloxane and after passing the device, a total concentration of siloxane was 5.2~12.7 ppb. Average removal efficiency was 75% and especially the L2 composition showed higher efficiency more than 95%. In contrast, D4 showed a 60% and D5 was almost not removed. The molecular weight of L2 is 162 and smaller than other siloxane component (D4: 297, D5: 371). So It can be adsorbed on the activated carbon easily.