赛隆
化学
辐照
氮化硅
等离子体
氮化物
阴极射线
硅
分析化学(期刊)
化学工程
电子
陶瓷
有机化学
图层(电子)
核物理学
工程类
物理
量子力学
作者
А. А. Клопотов,В. А. Власов,Konstantin Bezukhov,Г. Г. Волокитин,Yu. S. Sarkisov,Yu. F. Ivanov,M. S. Syrtanov,В. В. Шеховцов
标识
DOI:10.1134/s0018143923070226
摘要
A study was made of the effect of low-temperature plasma and pulsed electron beam irradiation on a mixture of silicon and aluminum nitride powders. It was found that as a result of irradiation with high-enthalpy plasma flux on the studied sample a thermochemical reaction occurred with the formation of a multiphase mixture in which the main product is β-SiAlON. Irradiation with a pulsed electron-pulse beam led to the formation of compounds based on β-SiAlON with different chemical compositions. The morphology of particles on the surface of irradiated samples was determined. The parameters of the crystal structure of compounds based on SiAlON is calculated.
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