Influence of the number of femtosecond laser pulses on femtosecond laser ablation silicon surface producing micro-nano structure

To study the relationship between microstructuring of and the number of femtosecond laser pulses,the number of femtosecond laser pulses irradiating the is changed within the same atmosphere of SF6,it is find that there is a non-linear relationship between the height of the micro-cones and the number of femtosecond laser pulses.The study of this relationship is helpful to determine the experiment condition of fabricating black silicon with high micro-cones for high absorption,and the conversion efficiency of the electro-optical devices is improved.