Temperature Compensation Method Based on an Improved Firefly Algorithm Optimized Backpropagation Neural Network for Micromachined Silicon Resonant Accelerometers

The output of the micromachined silicon resonant accelerometer (MSRA) is prone to drift in a temperature-changing environment. Therefore, it is crucial to adopt an appropriate suppression method for temperature error to improve the performance of the accelerometer. In this study, an improved firefly algorithm-backpropagation (IFA-BP) neural network is proposed in order to realize temperature compensation. IFA can improve a BP neural network’s convergence accuracy and robustness in the training process by optimizing the initial weights and thresholds of the BP neural network. Additionally, zero-bias experiments at room temperature and full-temperature experiments were conducted on the MSRA, and the reproducible experimental data were used to train and evaluate the temperature compensation model. Compared with the firefly algorithm-backpropagation (FA-BP) neural network, it was proven that the IFA-BP neural network model has a better temperature compensation performance. The experimental results of the zero-bias experiment at room temperature indicated that the stability of the zero-bias was improved by more than an order of magnitude after compensation by the IFA-BP neural network temperature compensation model. The results of the full-temperature experiment indicated that in the temperature range of −40 °C~60 °C, the variation of the scale factor at full temperature improved by more than 70 times, and the variation of the bias at full temperature improved by around three orders of magnitude.