Vacuum deposition system

The Physics Section vacuum deposition system is available for several types of thin film techniques. This vacuum evaporation system operates in the high vacuum range. The evaporation source is a resistive heating element, either a boat or a filament design. Coating is then line of sight from the source. Substrates to be coated can have a maximum diameter of 17 inches. At this time the variations in the thickness of the coatings can be controlled, by monitor, to within about 100 angstroms. The system diagrams follow the Operation Procedures and the Sample Coating Procedures provided in this document. 3 figs.