Densification Process of AZO Targets

The aluminum zinc oxide(AZO) targets were densified by cool pressure-sintering technique.The experiments were designed to explore the influence of four important factors,i.e.WAl2o3(%),pressure(MPa),sintering temperature(℃) and sintering time(h),on the relative density of AZO targets,and to determine the densification parameters for AZO targets with maximal relative density.The research results have shown that the best conditions for the preparation of AZO targets with high relative density are as follows:WAl2o32%,pressure 11 MPa,sintering temperature 1200℃,and sintering time 5 h;or,WAl2o34%,pressure 13 MPa,sintering temperature 1300 ℃ and sintering time 2 h.Under these conditions,the values of relative density of AZO targets are the largest(96.63% and 96.04%,respectively).