Degradation of electrical performance and radiation damage mechanism of cascode GaN HEMT with 80 MeV proton

Abstract In this paper, proton irradiations on Cascode GaN HEMT power device with an energy of 80 MeV and fluences of 2 × 10 11 p/cm 2 and 6 × 10 11 p/cm 2 have been carried out, where the threshold voltages drifted negatively by 20.55% and 28.17%, respectively. After two months of room temperature annealing, the threshold voltages recovered 0.22 V and 0.27 V, respectively. The ionizing deposition energy (IEL) was simulated by using Monte Carlo software and TCAD, it the results showed that the value of IEL in Si MOSFET is 5 ∼ 6 orders higher than that in GaN HEMT, while the value of the non-ionizing energy loss (NIEL) is one order higher than that in GaN HEMT. It means that the proton irradiation on the Cascode depleted GaN HEMT is more prone to produce displacement damage. As a large number of electrons and holes pairs were existed on the incident path of Si MOSFET under the proton irradiation, the produced electron will be captured by the gate oxide traps at the SiO 2 /Si interface, and the holes be captured by the defects generated in displacement damage, resulting in the accumulation of oxide trapped charges. Then, the electrical performance of Si MOSFET degrades seriously, thereby affecting the performance of the entire device. The studies will be helpful for the radiation hardening of Cascode GaN HEMT.