Enhanced polarization properties of one-axis-oriented PZT thin films on transparent glass substrates by controlling chemical composition

Ferroelectric lead zirconate titanate Pb(Zr,Ti)O3 (PZT) films were deposited on ITO/glass substrates by chemical solution deposition (CSD) technique with processing temperature below the grass-transition point. (100)c-oriented PZT films were successfully grown on the ITO/glass substrates with the buffer layer of calcium niobate Ca2Nb3O10 nanosheets (ns-CN), together with enhanced crystallinity with increasing PbTiO3 content in PbZrO3–PbTiO3 system, i.e., x in Pb(Zr1−xTix)O3. Moderate remanent polarization of ∼30 µC cm−2 and relatively high optical transparency of approximately 80 % were accomplished for the PZT films on ns-CN/ITO/glass with x = 0.80 even at the crystallization temperature of 500 °C, whereas it exhibited only lower piezoelectric constant d33 of 22 pm V−1.