材料科学
制作
纳米光刻
吞吐量
纳米技术
光电子学
平版印刷术
激光器
光学(聚焦)
光子学
纳米压印光刻
无光罩微影
光刻
聚合
软光刻
3D打印
特征(语言学)
可扩展性
计算机科学
光学
光子晶体
纳米线
作者
Liang Xu,Mengdi Luo,Jisen Wen,Chenyi Su,Zhenyao Yang,Xiaoming Shen,Liang Zhang,Zhen Wei,Chaomin Ding,Dazhao Zhu,Cuifang Kuang,Xu Liu
标识
DOI:10.1002/lpor.202502250
摘要
ABSTRACT Two‐photon polymerization direct laser writing (TPP‐DLW) enables fully 3D nanofabrication and offers clear advantages over conventional lithography for optical elements, biomedical devices, and advanced functional materials. Nonetheless, fabrication accuracy and throughput remain key bottlenecks. In light of these challenges, this work presents a 10‐channels parallel peripheral photoinhibition direct laser writing technique, dubbed ‐DLW, for sub‐diffraction‐limited 3D nanoprinting that simultaneously narrows feature size and improves throughput compared with traditional DLW. By employing a 3D hollow focus in conjunction with peripheral photoinhibition (PPI) technique, the feature size of the fabricated suspended nanowire is reduced from nm to nm. Leveraging fast and parallel scanning, the ‐DLW system achieves a maximum printing speed on the order of voxels per second in experiments, while maintaining high accuracy, throughput, and design flexibility. This work establishes a scalable platform for high‐precision, high‐throughput, and 3D nanoprinting and offers a viable pathway to advance functional device fabrication in photonic systems, biomedical interfaces, and engineered metamaterials.
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