Development of a 2-DOF Rotary Ultrasonic Actuator for Reflector Steering

执行机构 声学 材料科学 超声波传感器 反射器(摄影) 开发(拓扑) 机械工程 工程类 光束转向 超声波电动机 反射(计算机编程) 气动执行机构 光学 传感器 超声波检测 振动控制 控制系统
作者
Jie Deng,Kai Wu,Yingzhi Wang,Jing Li,Jinghan Guan,Shijing Zhang,Yingxiang Liu
出处
期刊:IEEE Transactions on Industrial Electronics [Institute of Electrical and Electronics Engineers]
卷期号:: 1-11
标识
DOI:10.1109/tie.2026.3670356
摘要

Free-space optical communication systems typically require reflector steering mechanisms (RSM) with large angular travel, compact design, and microradian-level resolution. However, conventional electromagnetic motors, are generally unable to satisfy all these actuating requirements simultaneously due to inherent technical limitations. Herein, this study presents a RSM driven by a two-degree-of-freedom (2-DOF) rotary ultrasonic actuator (RUA). The proposed compact RUA combines a second-order longitudinal vibration mode and two orthogonal fifth-order bending vibration modes to enable continuous 360° rotational motion while achieving $\boldsymbol{\mu}$ rad-level displacement resolution through sinusoidal pulse excitation mode. The working principles are validated through theoretical and finite element analysis. A prototype was fabricated with dimensions of 82.4 × 9.2 × 9.2 mm3 and a mass of 29.4 g. Experimental results demonstrate maximum 2-DOF rotational speeds of 121.19 rpm ( $\boldsymbol{\theta}$ X ) and 42.79 rpm ( $\boldsymbol{\theta}$ Y ) under a 518.7 g load, with minimum step displacements of 27.46 and 18.50 $\boldsymbol{\mu}$ rad, respectively. Furthermore, the 2-DOF rotational capability of the RSM is utilized to generate programmable trajectories, including geometric shapes and alphanumeric characters. The experimental results suggest that the proposed RSM represents a potential candidate for lightweight, high-precision optical steering applications in free-space optical communication systems.
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