材料科学
蚀刻(微加工)
沟槽
纳米-
六方氮化硼
之字形的
纵横比(航空)
纳米技术
异质结
金属
氮化硼
等离子体刻蚀
光电子学
复合材料
几何学
冶金
图层(电子)
数学
石墨烯
作者
Chen Chen,He Li,Chengxin Jiang,Lingxiu Chen,Huishan Wang,Xiujun Wang,Ziqiang Kong,Xiaojing Mu,Zhipeng Wei,Kenji Watanabe,Takashi Taniguchi,Tianru Wu,Zhang Dao-li,Haomin Wang
出处
期刊:2D materials
[IOP Publishing]
日期:2022-03-01
卷期号:9 (2): 025015-025015
被引量:8
标识
DOI:10.1088/2053-1583/ac5461
摘要
Abstract Stimulated by the attractive performance of multi-dimensional heterostructures involving hexagonal boron nitride ( h BN), intense attentions have been paid to creation of sharp boundary/interface, which could bring h BN nano-structures additional appealing physical properties. However, the lack of controllable synthesis limits further experimental investigation on h BN nano-structures. Here, the directional etching of transitional metal nano-particles (NPs) on the surface of h BN to produce nano-trenches with sharp edges was systematic investigated. It is found that, only Pt and Ir NPs can produce armchair-oriented nano-trenches at low H 2 partial pressure, while other transitional metals lead to zigzag oriented nano-trenches. The density and width of the nano-trenches always increase with etching temperature and the pre-treated solution concentration while the trench orientation depends on both H 2 partial pressure and etching temperature. The aspect ratio of nano-trenches may reach several thousand under optimized conditions. The method exhibited here shines a light on edge-selective patterning of 2D crystals.
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