PZT lateral bimorph based sensor cuboid for near zero power sensor nodes

We present a zero-power multi sensor node integrated with a nanowatt power CMOS classifier. The vibration, acoustic, magnetic, rotation, and accelerometer sensors utilize lateral bimorphs as motion sensors. The sensor node is contained in a single enclosed package which serves as both the housing for the sensors but also as a Helmholtz resonator, providing increased signal at frequencies of interest for an acoustic microphone. The platform is evaluated in a field test consisting of detection of operational mode of an electrical generator. The power consumption is 2 nW power consumption in the off-state. Successful mode-of-operation classification is demonstrated with no false alarms in a time period as long as 10 hours.