MEMS AND METAMATERIALS: A PERFECT MARRIAGE AT TERAHERTZ FREQUENCIES

This paper reports our recent progress on creating active structures and devices to enhance the ability to manipulate and detect far-infrared, or terahertz (THz), radiation by combining electromagnetic metamaterials with MEMS technologies.We have designed, simulated, and fabricated state-of-the-art THz components which include a THz resonance switch, flexible THz metamaterials, and 3D THz metamaterials.Preliminary results demonstrate the potential of MEMS-enhanced metamaterials for THz applications.