沉积(地质)
溅射
钠
硫化物
化学计量学
电化学
无定形固体
材料科学
硫化钠
溅射沉积
薄膜
表征(材料科学)
反应性(心理学)
无机化学
化学工程
分析化学(期刊)
化学
纳米技术
电极
冶金
结晶学
物理化学
地质学
环境化学
古生物学
病理
替代医学
工程类
医学
沉积物
作者
Rebecca D. McAuliffe,Victoria Petrova,Matthew J. McDermott,J. Landon Tyler,Ethan C. Self,Kristin A. Persson,Ping Liu,Gabriel M. Veith
出处
期刊:Journal of vacuum science & technology
[American Institute of Physics]
日期:2021-07-29
卷期号:39 (5)
被引量:7
摘要
We report the direct deposition of model sodium sulfide films by RF magnetron sputtering from Na2S and Na2S2 deposition targets. Analytical characterization and electrochemical cycling indicate that the deposited films are amorphous with stoichiometries that correspond to Na2S3 and Na2S2 formed from the Na2S and Na2S2 targets, respectively. We propose that the loss of Na in the case of the Na2S target is due to preferential sputtering of Na resulting from the higher energy required to break the Na–S bonds in Na2S. The development of thin film sodium sulfides opens a new route to understanding their fundamental properties, such as Na+ transport, conductivity, and reactivity.
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