TCAD Calibration at Cryogenic Temperatures for CMOS Image Sensor Simulations

A simple calibration method is presented for the technology computer-aided design (TCAD) simulation at cryogenic temperature, with a special focus on image sensor application. Based on the principle that TCAD tools are not completely mature for cryogenic environment, a calibration is needed to perform reliable simulations. In this work, measurements and simulations of sheet resistances are used for the TCAD calibration, and an experimental verification is performed by means of the extraction of pinning voltages on JFETs and on a pixel including a pinned photodiode (PPD).