2.6 kV NiO/Ga2O3 Heterojunction Diode with Superior High-Temperature Voltage Blocking Capability

In this study, we demonstrate an effective edge termination for vertical NiO/β-Ga 2 O 3 heterojunction diodes using a continuous p-NiO film as Junction Termination Extension (JTE). The JTE can spread out the edge electric field and reduce the peak electric field of the devices. The annealing process was optimized to suppress leakage current and increase I on /I off ratio up to ~10 ¹⁰ . The record high breakdown voltage of 2.66 kV in heterojunction diodes with uniform distribution of leakage current was achieved. Analysis of temperature-dependent reverse current revealed that the reverse leakage mechanism of the devices is dominated by Poole-Frenkel emission. The breakdown voltage of 1.77 kV at 250 °C shows remarkable high-temperature voltage blocking capability of the devices and validates the great potential of NiO/β-Ga 2 O 3 diodes for high-temperature and high-voltage power electronic applications.