Three-Dimensional Nanostructuring With Femtosecond Laser Pulses

The development of simple laser-based technologies for the fabrication of complicated three-dimensional (3-D) microstructures with a structure size down to 100 nm is reported. These technologies are based on nonlinear multiphoton laser-matter interaction processes allowing to overcome the diffraction limit and to fabricate 3-D structures inside transparent materials. Examples on nanostructuring of metals, dielectrics, and polymers are presented.