Atomic Force Microscope for Nanometer 3D Surface Shape and Micro Size Measuring

The SPM goes forward one of important instruments measuring in the nano-scale. Following applied in the industrial measurement,the calibration,traceability and measuring uncertainty of SPM played an important role as one kind of metrological instrument. The paper described the structure,calibration and application in international comparison of one metrological atomic force microscope. Keyword:Atomic Force Microscope for Nanometer 3D Surface Shape and Micro Size Measuring$$$$GAO Sitian,YE Xiaoyou,SHAO Hongwei,DU Hua,JIN Qihai,YANG Ziben,CHEN Yunchang (National Institute of Metrology P.R.China,Beijing 100013,CHN) Abstract:The SPM goes forward one of important instruments measuring in the nano-scale. Following applied in the industrial measurement,the calibration,traceability and measuring uncertainty of SPM played an important role as one kind of metrological instrument. The paper described the structure,calibration and application in international comparison of one metrological atomic force microscope.