에너지재료 : MEMS 공정을 이용한 마이크로 PZT 외팔보 에너지 수확소자의 제작 및 특성

In this work, we designed and fabricated a multilayer thin film Pb(Zr,Ti)O(3) cantilever with a Si proof mass for low frequency vibration energy harvesting applications. A mathematical model of a multi-layer composite beam was derived and applied in a parametric analysis of the piezoelectric cantilever. Finally, the dimensions of the cantilever were determined for the resonant frequency of the cantilever. We fabricated a device with beam dimensions of about 4,930 μm × 450 μm × 12 μm, and an integrated Si proof mass with dimensions of about 1,410 μm × 450 μm × 450 μm. The resonant frequency, maximum peak voltage, and highest average power of the cantilever device were 84.5 Hz, 88 mV, and 0.166 μWat 1.0 g and 23.7 Ω, respectively. The dimensions of the cantilever were determined for the resonance frequency of the cantilever.