A low-cost and high-efficiency magnetic levitation stage based on Hall sensors

Abstract Emerging maglev stage systems demonstrate significant ability in high-end control industrial manufacturing characterized by their non-contact operation and multi-degree-of-freedom motion capabilities. Conventional sensing and driving systems for maglev stages, however, are typically cost-prohibitive, limiting their broader application potential. To this end, this paper develops a low-cost and effective maglev stage system utilizing Hall sensors to construct the measurement system and high-efficiency H-bridge for current supply. Spatial positioning relationships are analyzed to define the motor position measurement strategy, and non-linear errors are calibrated in the measurement system. A principle prototype is constructed and experimentally validated. The results indicate that the translational and rotational motion resolutions of the stage reach 5 μ m and 50 μ rad , respectively, with trajectory tracking performance matching that of the stage using laser displacement sensors.