A new methodology for local thermal property evaluation of SiO2 in nanostructure with SThM and inverse modeling approach

This article seeks to evaluate the local thermal conductivity of SiO 2 at the nanoscale using the Wollaston microprobe through Scanning Thermal Microscopy (SThM). By combining experimental measurements with Finite Element Method (FEM) modeling, the study aims to determine the thermal conductivity of silicon dioxide within an asymmetric nanometer-scale structure. The innovation of this work lies on one hand in the use of an asymmetric sample geometry and, on the other hand, in the implementation of a minimization-based inverse method (Levenberg–Marquardt algorithm) to extract the thermal conductivity. This combined experimental-numerical approach provides an enhanced understanding of the material's thermal behavior at the micro- and nanoscale.