Design and simulation of a MEMS-based piezoelectric micropump for bio-medical applications

Purpose The purpose of this paper is to design and simulate a piezoelectric micropump using microelectromechanical systems technology for drug delivery applications. Design/methodology/approach Two piezoelectric actuators are used to actuate and bend the diaphragms in the proposed structure. In this micropump, the liquid flow is rectified by two silicon check valves. Findings The use of two piezoelectric transducer (PZT) actuators in the parallel mod not only reduces dead volume but also increases stroke volume as well. In addition to increasing the flow rate, this phenomenon enhances the operation of the micropump to have self-priming as smoothly as possible. Originality/value This actuating method results in a 22% increase in flow rate and compression ratio, as well as a 15% reduction in function voltage. The fluid-solid interaction is simulated using COMSOL Multiphysics 5.3a.