Influence of chemical effects on Al high-resolution Kα X-ray spectra in proton and alpha particle induced X-ray spectra

Kα X-ray emission induced by 2 MeV H and 3 MeV He ions in thick Al metal, Al 2 O 3 , Al 2 S 3 , AlN, and AlPO 4 was measured using a wavelength-dispersive spectrometer with a flat diffraction crystal to study the chemical sensitivity of related X-ray spectra.