Differential Hall Effect Metrology for Electrical Characterization of Advanced Semiconductor Layers

Semiconductor layers employed in fabricating advanced node devices are becoming thinner and their electrical properties are diverging from those established for highly crystalline standards. Since these properties also change as a function of depth within the film, accurate carrier profiling solutions are required. The Differential Hall Effect (DHE) technique has the unique capability of measuring mobility and carrier concentration (active carriers) through the depth of a semiconductor film. It comprises making successive sheet resistance and sheet Hall coefficient measurements as the thickness of the electrically active layer at a test region is reduced through successive material removal steps. Difference equations are then used to process the data and plot the desired depth profiles. The fundamentals of DHE were established in 1960s. Recently, the adaption of electrochemical processing for the material removal steps, and the integration of all other functionalities in a Differential Hall Effect Metrology (DHEM) tool, has made this technique more practical and accurate and improved its depth resolution to a sub-nm range. In this contribution, we review the development history of this important technique and present data from recent characterization work carried out on Si, Ge and SiGe layers.