Thermal stabilization of machine tool spindle by feedback temperature control

Precise temperature control is required in various fields including machine tools and semiconductor manufacturing machines. In order to improve the machining accuracy of machine tools, it is necessary to minimize the thermal deformation of machine tools due to its temperature change. For a cooling purpose, forced fluid cooling systems are used to reduce the temperature change of machine tools. In general, the response of conventional chiller systems is slow. Furthermore, the chiller controls the temperature of target component without feedback loop. Accordingly, the temperature control performance is quite limited. In this study, a sophisticated cooling system with feedback of target component temperature based on proposed temperature control system is developed. A performance of the control system is evaluated for a surface temperature of a built-in motor spindle, experimentally.