Si and N incorporated hydrogenated diamond like carbon film with excellent performance for marine corrosion resistance

Under the background of the development of marine resources, marine corrosion has become a focus problem. A series of Si and N incorporated hydrogenated diamond like carbon (SiN-HDLC) film with excellent corrosion resistance performance was deposited by plasma enhanced chemical vapor deposition. Results suggest that the sp 3 /sp 2 ratio of SiN-HDLC films presents a trend of increasing first and then decreasing with the improvement of the N 2 /SiH 4 ratio. The adhesion between the as-deposited HDLC film and the substrate is tight (no microcracks) and the film surface is uniform and compact. The potentiodynamic polarization and electrochemical impedance spectroscopy results indicate that the SiN-HDLC film possesses better corrosion resistance in artificial seawater than that of Si-HDLC and N-HDLC film, and is much better than 304SS substrate. Besides, the SiN-HDLC film with the N 2 /SiH 4 of 1/1 shows the best corrosion resistance. The as-deposited SiN-HDLC film possesses more excellent corrosion resistance in the artificial seawater environment compared with the reported DLC films and this study provides a promising protective material for marine corrosion resistance.