Microfluidic Devices Produced by Two‐Photon‐Induced Polymerization

This chapter introduces optically driven microfluidic devices including micropumps and micromanipulators using movable microcomponents fabricated by two-photon microfabrication. Two-photon microfabrication allows the creation of 3D microstructures by scanning the laser focus inside a photopolymer, unlike conventional stereolithography. The chapter reviews author's experiments that generate a Laguerre-Gaussian beam by using a spatial light modulator. Since a Laguerre-Gaussian beam has orbital angular momentum, microparticles can be rotated along the doughnut-ring-like optical intensity distribution at a focal plane. The metalized micromachines are fabricated by the combination of two-photon microfabrication and electroless plating. Since the metalized micromachines are be driven by repulsive force due to reflection of the incident laser beam at the metalized surface, the optical radiation pressure is drastically improved. The reduction of the required laser power to drive micromachines enables the reduction of both the size and cost of the total driving system.