材料科学
碳化钽
泥浆
制作
烧结
石墨
涂层
碳化物
冶金
原材料
化学工程
复合材料
化学
替代医学
有机化学
病理
工程类
医学
作者
Daisuke Nakamura,Keisuke Shigetoh,Akitoshi Suzumura
标识
DOI:10.1016/j.jeurceramsoc.2016.10.029
摘要
TaC coatings were deposited on graphite substrates via wet powder forming and sintering to potentially achieve both a highly reliable and low-cost process. Non-aqueous solvent mixtures of TaC slurries were optimized through characterization of raw materials and a novel design guide based on Hansen solubility parameters. The optimized TaC slurries enabled the formation of high-quality TaC powder compact films with ultrahigh powder packing densities of ≥70% (ca. 85% at maximum), which contributed to prevent defect formation in the TaC coatings after sintering. The TaC-coated components were tested in practical high-temperature processes, such as AlN and SiC bulk single crystal growth processes, and a SiC device fabrication process, which confirmed sufficiently low-levels of impurity incorporation and surface contamination from the TaC layers. The novel TaC-coated graphite components will contribute to higher quality and lower cost for bulk crystal growth, device fabrication, and epitaxial film growth processes of group-III nitrides and SiC.
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