Optical waveguide formed by cubic silicon carbide on sapphire substrates
作者
Xiao Tang,K. Wongchotigul,Michael G. Spencer
出处
期刊:Applied Physics Letters [American Institute of Physics] 日期:1991-03-04卷期号:58 (9): 917-918被引量:28
标识
DOI:10.1063/1.104476
摘要
Optical confinement in beta silicon carbide (β-SiC) thin films on sapphire substrate is demonstrated. Measurements are performed on waveguides formed by the mechanical transfer of thin β-SiC films to sapphire. Recent results of epitaxial films of SiC on sapphire substrates attest to the technological viability of optoelectronic devices made from silicon carbide. Far-field mode patterns are shown. We believe this is the first step in validating a silicon carbide optoelectronic technology.