A scanning contact probe for a micro-coordinate measuring machine (CMM)

A new high precision contact scanning probe able to measure miniature components on a micro/nano-coordinate measuring machine (CMM) is proposed. This contact probe is composed of a fiber stylus with a ball tip, a floating plate and focus sensors. The stylus is attached to a floating plate, which is connected to the probe housing via four elastic wires. When the probe tip is touched and then deflected by the workpiece, the wires experience elastic deformations and the four mirrors mounted on the plate will be displaced. These displacements can be detected by four corresponding laser focus probes. To calibrate this touch trigger probe, a double-trigger method is developed for a high-speed approach and a low-speed touch. Experimental results show that the probe has a symmetric contact property in the horizontal XY plane. The contact force is found to be about 109 µN. The standard deviation of the unidirectional touch is less than 10 nm and the pre-travel distance is around 10 nm with a standard deviation of less than 3 nm.