Innovations with a massively paralleled, microelectromechanical systems (MEMS) toward piston-mode-based phase light modulator (PLM)

Piston‐mode Fourier based optical imaging created using an adaptation of the base DLP® Products torsional, spatial light modulator technology is presented. Technology, advancements and performance metrics such as, actuation speed, efficiency, and pixel coupling are shown for this 10.8 μm pitched pixel array. Device potential includes upwards of 5.7kframes/sec actuation.