铌酸锂
材料科学
抛光
谐振器
光学
飞秒
二次谐波产生
制作
光电子学
非线性光学
激光器
拉曼散射
表面微加工
激光加工
波长
拉曼光谱
激光束
替代医学
复合材料
病理
物理
医学
作者
Rongbo Wu,Jianhao Zhang,Yang Ni,Wei Fang,Lingling Qiao,Zhifang Chai,Jintian Lin,Ya Cheng
出处
期刊:Optics Letters
[The Optical Society]
日期:2018-08-20
卷期号:43 (17): 4116-4116
被引量:146
摘要
We report on fabrication of crystalline lithium niobate microresonators with quality factors above 10^7 as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the lithium niobate on insulate (LNOI) into a microdisk, followed by a chemo-mechanical polishing process for transferring the disk-shaped pattern to the LNOI. Nonlinear processes including second harmonic generation and Raman scattering have been demonstrated in the fabricated microdisk.
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