Development of an In-situ Metrology Technique for Freeform Optics
作者
Dali Ramu Burada,Kamal Kishore Pant,Vinod Mishra,Mohamed Bichra,Gufran S. Khan,Stefan Sinzinger,Chandra Shakher
出处
期刊：Frontiers in Optics [Optica Publishing Group] 日期：2018-01-01卷期号：: JTu3A.11-JTu3A.11
标识
DOI：10.1364/fio.2018.jtu3a.11
摘要
The paper presents the development of Shack-Hartmann sensor as in-situ metrology technique that can be integrated to the machining platforms and helps in the development process of aspheric and freeform optics within the required tolerances.
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(2025-6-4)
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