The amount and chemical states of fiber surface elements were measured for PAN and fibers in pre-oxidation and carbonization by x-ray photoelectron spectroscopy (XPS). The results show: there is amount of silicon in PAN fiber surface; volatile low molecular weight compounds are removed from PAN fiber surface and the chemical states of O, N, Si are not changed in pre-oxidation; there are various chemical states of C, O, N, Si in carbonization; and a number of oxygen-containing functional groups on carbon fiber surface.