Properties of Plasma-Polymerized Hexamethyldisiloxane and Vinylmethoxysilane.

Plasma polymerization of hexamethyldisiloxane (HMDSO) and vinylmethoxysilane (VMS) was carried out by audio-frequency (1∼20kHz) and radio-frequency (13.56MHz) glow discharge, and the effects of the polymerization conditions on film properties were studied. Films produced by RF discharge were brown in color, whereas those produced by AF discharge were colorless and transparent. The contact angle of water was greater-typically about 100°and 75°for HMDSO and VMS films polymerized by AF discharge than for those polymerized by RF discharge. In films polymerized by RF discharge, the monomer structure was destroyed and there were many inorganic linkages and crosslinks. Films deposited on stainless steel suppressed dissolution of the substrate in sulfuric acid solution.