Advanced Laser-Assisted Technique for Bonding Miniature Multichannel Laser Diode to Silicon Photonics Circuit

光电子学 光子学 激光器 材料科学 二极管 硅光子学 硅 激光二极管 光子集成电路 半导体激光器理论 混合硅激光器 光学 物理
作者
Александр Власов,Joel Salmi,Heidi Tuorila,Santeri Lehtinen,Jukka Viheriälä,Mircea D. Guina
出处
期刊: 卷期号:: 1-5 被引量:4
标识
DOI:10.23919/nordpac65171.2025.11084265
摘要

The rapid evolution of information technology—driven by artificial intelligence, cloud computing, search engines, e-commerce, and Big Data—has spurred increasing demand for new application areas. Photonics remains central to expanding global communication networks, yet there is growing pressure to develop highly integrated solutions rather than rely on separate components. While traditional microelectronics-photonics hybrid integration methods, such as mass-reflow and thermocompression bonding, are often difficult to implement effectively in silicon photonics. Consequently, the field now demands more advanced techniques that ensure precise alignment of photonic devices, faster assembly, and consistent reproducibility on high-volume production scales.In this context, Laser-Assisted Bonding (LAB) has emerged as a promising alternative to existing bonding methods. Notably, LAB enables fast, energy-efficient integration using bottom illumination and real-time through-silicon imaging, achieving precise waveguide alignment while minimizing thermal distortion — a key requirement in high-throughput photonic packaging.In a practical demonstration, we employed LAB to mount a 1×1 mm III–V multichannel chip onto a silicon photonic circuit. We demonstrate that modifying the pick-up tool geometry significantly improves bonding precision. Real-time through-silicon microscopy and SEM imaging confirm enhanced alignment and bond quality. The resulting joints meet shear strength criteria defined by MIL-STD-883H, validating the method's mechanical reliability. Validating LAB’s functionality in this setting also underscores its potential to enhance overall yield in photonic integration.Taken together, these findings represent a significant step forward in photonic integration technologies, highlighting LAB’s capability to address the expanding and increasingly stringent needs of this rapidly developing sector.
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