Tunable TiZrMoC Coatings: A Comprehensive Study of Microstructure, Mechanical Properties, and Wear Resistance

TiZrMoC coatings were deposited on Si(100) substrates using a DC dual magnetron sputtering. The composition was controlled by adjusting the sputtering parameters of the TiZrMo and graphite targets. The influence of graphite target current on the resulting coating properties was explored. TEM analysis revealed a single-phase structure with Ti/Mo/Zr substitutional elements, columnar grains, and a strong [111] texture. Nanotwins and stacking faults were prevalent within the nanocrystals. EDX, SIMS, XRD, and XPS analyses confirmed the elemental composition and nanostructure. Computational modeling was employed to investigate the mixing behavior of the quaternary solid solutions depending on the valency electron concentration. The films exhibited exceptional mechanical properties, including a maximum hardness of 35 GPa and a wear rate of 2.11 × 10