结晶度
材料科学
铁磁性
基质(水族馆)
图层(电子)
磁各向异性
表面粗糙度
溅射沉积
自旋电子学
溅射
分析化学(期刊)
结晶学
薄膜
复合材料
磁化
凝聚态物理
纳米技术
铁磁性
化学
磁场
物理
地质学
海洋学
量子力学
色谱法
作者
Wenchang Li,Xinxing Xu,Tenghua Gao,Takashi Harumoto,Yoshio Nakamura,Ji Shi
标识
DOI:10.1088/1361-6463/ac5e1b
摘要
Abstract Mn 4 N films have been prepared on the glass substrate by reactive magnetron sputtering, using Mn 3 N 2 as the seed layer. Compared with Mn 4 N film directly grown on the glass substrate, the crystallinity and perpendicular magnetic anisotropy (PMA) of the Mn 4 N film with the seed layer are significantly enhanced. By varying the thickness of the Mn 3 N 2 seed layer, the structural and magnetic properties are systematically investigated. It is shown that the seed layer thickness is pivotal in the growth of Mn 4 N with good crystallinity. The crystallinity of Mn 4 N first improves with the increase in the layer thickness of Mn 3 N 2 , and degrades after an optimal thickness; this is related to the change in the surface roughness of the Mn 3 N 2 layers. The Mn 3 N 2 layer not only promotes the growth of Mn 4 N film with c -axis orientation, but also provides additional N atoms to the growing surface to prevent Mn 4 N from being oxidized. This simple method can be used to prepare high-quality Mn 4 N films on a glass substrate, which show strong PMA and are suitable for spintronics applications.
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