Room-Temperature Hydrogen Sensor Based on Pd-Capped Mg2Ni Thin Film

Pd-capped Mg2Ni alloy thin films were prepared by DC magnetron sputtering using Mg, Ni and Pd targets, and their hydrogen sensing characteristics have been investigated. Pd-capped Mg2Ni films with thicknesses of 10 nm Pd and 40 nm Mg2Ni show a good hydrogen sensing property for hydrogen-containing air at room temperature. Their sensing range is from 0.01% to 10% hydrogen in air. These films are supposed to be candidates for low-cost room temperature hydrogen sensor.