Properties of chemical vapor infiltration diamond deposited in a diamond powder matrix
作者
J.K.G. Panitz,D. R. Tallant,C. R. Hills,David J. Staley
出处
期刊:Journal of vacuum science & technology [American Institute of Physics] 日期:1994-07-01卷期号:12 (4): 1480-1486被引量:3
标识
DOI:10.1116/1.579341
摘要
Densifying nonmined diamond powder precursors with diamond produced by chemical vapor infiltration is an attractive approach for forming thick diamond deposits that avoids many potential manufacturability problems associated with predominantly chemical vapor deposition (CVD) processes. We have developed two techniques: electrophoretic deposition and screen printing, to form diamond powder precursors on substrates. We then densify these precursors in a hot filament assisted reactor. Analysis indicates that a hot-filament-assisted chemical vapor infiltration process forms intergranular diamond deposits with properties that are to some degree different from predominantly hot-filament-assisted CVD material.