材料科学
激光器
光电子学
光学
制作
波导管
波长
山脊
激光阈值
蚀刻(微加工)
半导体激光器理论
作者
Bing Xiong,Changzheng Sun,Jian Wang,Zhibiao Hao,Yi Luo
摘要
Inductively coupled plasma (ICP) dry etching technique has been adopted to form narrow high-mesa ridge waveguide structure in a high-speed integrated EA modulator. A 3dBe bandwidth of over 12 GHz has been achieved without the use of polyimide in the DFB laser integrated EA modulator. Meanwhile, integrated device with a threshold current as low as 12 mA has been demonstrated by optimization ofthe wavelength detuning.
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