Light Element Analysis with an Electron Microprobe

Abstract In the microprobe, lead stearate decanoate multilayer analyzers have proven to be practical components for X-ray spectrochemical analysis of the light elements. Better controlled techniques in the deposition of the layers have already produced analyzers yielding improved peak to background ratios as well as higher counting rates. Operational techniques, optimizing instrumental performance, will be discussed. Analytical data on the elements fluorine through boron, obtained with a modified commercial microprobe, will be presented.