for Confocal Laser Scanning Microscope "LEXT" Series

mpus.cojp SUMMARY A two dimensional (2-D) Scanner-an-scanner (SOS) has been developed for commercial confocal laser scanning microscope (LSM) LEXT' series. The SOS consists of a newly develop ed electromagnetic MEMS scanner mOllll ted on a corrunercially avai lab le galvanometric scanner, being inclined at 45. The SOS realizes much smaller distortion in the 2-D scanning pattern than that obtained by gimbal ed type MEMS 2-D scanner. Key issue is miniaturizing the MEMS scanner so that it can be mounted onto the galvanometri c scanner It was reali zed by using a coil for both driving and sensing so that sensing output was increased, and thus size reduction of pennanent magnets have become possible, leading to the scanner volume of approximately 9.3 % of the one previo usly developed for a LSM, Olympus OLS1200.