Fast Response UV Detector by Vertically Allied ZrO2 Nanowire Array Through Glancing Angle Deposition

Vertically aligned zirconium dioxide (ZrO ₂ ) nanowire (NW) array based fast response ultraviolet (UV) detector has been fabricated upon ZrO ₂ thin film (TF) by glancing angle deposition (GLAD) technique. The detector shows ~1.4 fold lesser dark current and ~1.5 fold enhanced light current than the ZrO ₂ TF due to the formation of oxygen vacancies. Improved detector performances through ~1.8 fold high photosensitivity, low ideality, high barrier height and fast response (T _r = 0.26 sec and T _f = 0.25 sec) was also observed for ZrO ₂ TF/ZrO ₂ NW based device. Therefore, these improved optoelectronic performances will ensure that the vertically aligned ZrO ₂ TF/ZrO ₂ NW based device demonstrated good reliability in optoelectronic device applications.