Study of high breakdown-voltage AlGaN/GaN FP-HEMT

Fabrication and the characteristics at room temperature of FP-HEMT are reported, followed by a comparison of the actual characteristics with the conventional HEMT. With the incorporation of field plate, the breakdown voltage was enhanced from 52 to 142V.Comparison between AlGaN/GaN FP-HEMT and the conventional HEMT are also made, using Silvaco, as the simulation tool. The effect of enhancing the breakdown voltage is also investigated.