Frequency-modulated MEMS accelerometers for wide dynamic range and ultra-low consumption

The purpose of this paper is to review micro-electromechanical system (MEMS) based frequency-modulated (FM) accelerometers, from both a system and performance standpoint. After introducing the reasons behind the research developed in the last years on FM accelerometers, the paper compares different techniques for frequency modulation. A time-switched FM accelerometer is identified as a good candidate for applications that need wide full-scale range (FSR) and high stability at low consumption, with full 3-axis sensing.