Fabrication of a 3D nano-printing device

In this paper, we demonstrate fabrication processes of dual atomic force microscopic (AFM) probe with embedded micro-channels and a nozzle hole for liquid delivering function for 3D printing in nano-scale. The nozzle and embedded micro-channels were successfully fabricated with under-surface connection and hydrophilic inner walls. The narrow trench opening remained above the micro-channel, was completely sealed by combination of Si thermal oxidation and subsequent SiO₂ sputtering deposition. Twin Si tips with an outlet nozzle hole and embedded micro-channel were fabricated with the developed fabrication process.